Hlau lub hom phiaj
Product Description
Hlau Rotary Target
Orthogonal magnetic thiab hluav taws xob teb yog siv ntawm lub hom phiaj sputtering (cathode) thiab anode.Thiab sau cov roj inert yuav tsum tau (feem ntau Ar gas) nyob rau hauv lub tshuab nqus tsev siab chamber.Nyob rau hauv qhov kev txiav txim ntawm hluav taws xob teb, Ar gas yog ionized rau hauv zoo ions thiab electrons.Ib qho kev tsis zoo siab voltage yog siv rau lub hom phiaj, cov electrons emissions los ntawm lub hom phiaj yog cuam tshuam los ntawm magnetic teb, ionization probability ntawm cov roj ua hauj lwm nce, ib tug high-density plasma yog tsim nyob rau hauv lub cathode, thiab Ar ions raug cuam tshuam. los ntawm lub zog Lorentz.Tom qab ntawd ceev kom ya mus rau lub hom phiaj saum npoo, thiab foob pob lub hom phiaj ntawm qhov kub ceev, kom cov atoms sputtered ntawm lub hom phiaj ua raws li lub hauv paus ntsiab lus ntawm lub zog hloov dua siab tshiab, ya los ntawm lub hom phiaj saum npoo mus rau lub substrate, thiab tso lub siab kinetic zog zaj duab xis.
Txhawm rau txhawm rau txhim kho qhov kev siv ntawm lub hom phiaj cov khoom siv, lub cathode tig nrog kev siv ntau dua yog tsim, thiab cov khoom siv tubular lub hom phiaj yog siv rau sputtering txheej.Kev txhim kho ntawm cov khoom siv sputtering yuav tsum tau hloov lub hom phiaj los ntawm lub tiaj tus mus rau ib tug tubular zoo, thiab kev siv tus nqi ntawm cov tubular rotating lub hom phiaj yuav siab li 70%, uas loj daws qhov teeb meem ntawm kev siv tsawg ntawm lub hom phiaj.
| Cov khoom npe | Hlau lub hom phiaj |
| Khoom siv | W, Mo, Ta, Ni, Ti, Zr, Cr, TiAl |
| Kub muag loj | ID-133 / OD-157x3191mm ID-133/OD-157 X 3855mm ID-160/OD-180x1800mm Kuj tseem tuaj yeem ua tiav raws li cov kev xav tau tshwj xeeb ntawm cov neeg siv khoom |
| MOQ | 3 qab |
| Pob | Ply ntoo rooj |
Lus Cim: Peb tsuas yog tsim ntau lub hom phiaj hlau, thov sab laj peb kom paub meej.
Daim ntawv thov
Sputtering txheej yog ib hom tshiab ntawm lub cev vapor txheej txheej txheem.Piv nrog rau txoj kev evaporation txheej, nws muaj qhov pom tseeb zoo ..
nyob rau hauv ntau yam.Hlau sputtering lub hom phiaj tau siv nyob rau hauv ntau qhov chaw.Daim ntawv thov tseem ceeb ntawm rotating lub hom phiaj.
■Hnub ci hlwb
■Architectural iav
■Nws pib iav
■Semiconductor
■Flat-screen TV, thiab lwm yam
Cov ntaub ntawv xaj
Kev nug thiab kev txiav txim yuav tsum muaj cov ntaub ntawv hauv qab no:
☑Lub hom phiaj specification ID × OD × L (mm).
☑Qhov yuav tsum tau muaj.
☑Thov hu rau peb kom xav tau tshwj xeeb ntxiv.
